Order Number
|
MF-UA1010D
176-871-10
|
MF-UA2010D
176-872-10
|
MF-UA2017D
176-873-10
|
MF-UA3017D
176-874-10
|
XY stage travel range
|
4x4in
100x100mm
|
8x4in
200x100mm
|
8x6.7in
200x170mm
|
12x6.7in
300x170mm
|
Z-axis travel range
|
0-6in
0-150mm
|
0-6in
0-150mm
|
0-8.7in
0-220mm
|
0-8.7in
0-220mm
|
Focusing method
|
Manual focusing
coarse focusing:10mm/rev
fine focusing:0.1mm/rev
|
Manual focusing
coarse focusing:10mm/rev
fine focusing:0.1mm/rev
|
Manual focusing
coarse focusing:10mm/rev
fine focusing:0.1mm/rev
|
Manual focusing
coarse focusing:10mm/rev
fine focusing:0.1mm/rev
|
Measurement method
|
Linear encoder
2-axis model:X/Y-axis
3-axis model:X/Y/Z-axis
|
Linear encoder
2-axis model:X/Y-axis
3-axis model:X/Y/Z-axis
|
Linear encoder
2-axis model:X/Y-axis
3-axis model:X/Y/Z-axis
|
Linear encoder
2-axis model:X/Y-axis
3-axis model:X/Y/Z-axis
|
Resolution (switchable)
|
.0001"/.00005"/.00001"
0.001mm/0.0005mm/0.0001mm
|
.0001"/.00005"/.00001"
0.001mm/0.0005mm/0.0001mm
|
.0001"/.00005"/.00001"
0.001mm/0.0005mm/0.0001mm
|
.0001"/.00005"/.00001"
0.001mm/0.0005mm/0.0001mm
|
Measuring accuracy(at 20 °C)
|
XY-axis(2.2+0.02L)µm
L=Measuring length(mm)
when not loaded
JIS B 7153
|
XY-axis(2.2+0.02L)µm
L=Measuring length(mm)
when not loaded
JIS B 7153
|
XY-axis(2.2+0.02L)µm
L=Measuring length(mm)
when not loaded
JIS B 7153
|
XY-axis(2.2+0.02L)µm
L=Measuring length(mm)
when not loaded
JIS B 7153
|
Indication accuracy(20 °C)
|
Z-axis:(5+0.04L)µm
L=Measuring length(mm)
|
Z-axis:(5+0.04L)µm
L=Measuring length(mm)
|
Z-axis:(5+0.04L)µm
L=Measuring length(mm)
|
Z-axis:(5+0.04L)µm
L=Measuring length(mm)
|
Floating function
|
X and Y axis
with Quick-release mechanism
|
X and Y axis
with Quick-release mechanism
|
X and Y axis
with Quick-release mechanism
|
X and Y axis
with Quick-release mechanism
|
XY stage top size
|
11x11in
280x280mm
|
14x11in
350x280mm
|
16x13.6in
410x342mm
|
20x13.6in
510x342mm
|
Effective glass size
|
7.1x7.1in
180x180mm
|
10x6in
250x150mm
|
10.6x9.6in
270x240mm
|
14.6x9.6in
370x240mm
|
Swiveling function
|
-
|
-
|
±5 ̊(left)
|
±5 ̊(left)
|
Max. stage loading
|
22lbs/10kg
|
44lbs/20kg
|
44lbs/20kg
|
44lbs/20kg
|
Max.workpiece height
|
6in/ 150mm
|
6in/ 150mm
|
8.7in/ 220mm
|
8.7in/ 220mm
|