Ứng dụng: Kiểm tra điện tử và chất bán dẫn thời gian thực và tự động, phân tích lỗi
THÔNG SỐ KỸ THUẬT
Microfocus source
Max. kV
Max. power
Focal spot size
Focal spot size at max power
XT H 160
XT H 225
160 kV Xi, Reflection target
160 kV
60 W
3 µm up to 7 W
60 µm at 60 W
B
160 kV Reflection target
225 W
225 µm at 225 W
A
180kV Transmission target
180 kV
10 W
1 µm up to 3 W
10 µm at 10 W
225 kV Reflection target
225 kV
225 kV Rotating target option
450 W
10 µm up to 30 W
113 µm at 450 W
Basic configuration
Alternative configuration
Detectors
# Bits
Active pixels
Pixel Size
Max. frame rate at 1x1 binning
Max. frame rate at 2x2 binning
Varian 1313
14-bit
1000 x 1000
127 µm
10 fps
30 fps
Varian 2520
1900 x 1516
7.5 fps
15 fps
Varian 4030
2300 x 3200
3 fps
7 fps
Perkin Elmer 0820
200 µm
Manipulator
# Axes
5
Axes travel
(X) 185 mm (Y) 250 mm (Z) 700 mm (Tilt) +/- 30 (Rotate) n*360°
Max. sample weight
15kg
General
Cabinet dimensions (LxWxH)
1,830 mm x 875 mm x 1,987 mm
Weight
2,400 kg
Safety
All systems are manufactured to IRR99
Control software
All systems are controlled by Nikon Metrology’s in-house Inspect-X software
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