Observation Method:
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Brightfield, Darkfield, DIC, Simple Polarizing
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Main Body:
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Episcopic Stand with attached Universal Nosepiece - Power Supply built-in
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Focusing Mechanism:
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Stroke: 29mm; Coarse: 12.7mm per rotation (torque adjustable, focusing stop mechanism provided); Fine 0.1mm per rotation (in 1µm increments); Guide: 4-guide (two roller-race, torque adjustable)
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Episcopic Illuminator:
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Motorized aperture diaphragm (centerable, pinhole slider incorporated); fixed field diaphragm (with focus target); four 25mm filters (NCB11/ND4/ND16/GIF) can be mounted; Polarizer; Analyzer
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Light Source:
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100W Halogen - 100W Mercury - 75W Xenon - 150W Metal Halide
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Eyepiece Tube:
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UW Tilting Trinocular Eyepiece Tube (tilt angle 0-30°, erect images); F.O.V.: 25mm; Optical Path Changeover: 2-way (Binocular: Photo 100:0/0:100)
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Nosepiece:
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Fixed-Motorized Sextuple Universal Nosepiece (centerable), highly durable
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Stage:
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8 x 8 Stage; Cross Travel: 205 x 205mm, Coarse/line-movement changeover: manual; wafer holders: 5-8 inch, Mask Holders 5-6 inch
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Control:
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Front Panel: Nosepiece rotation buttons, Episcopic aperture diaphragm stop buttons, light intensity control knob; Remote Control: LCD panel, magnification changeover, motorized z-axis, episcopic aperture diaphragm stop buttons, light intensity control knob, motorized bright/darkfield changeover key, DIC adjustment knob, option keys
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Eyepieces:
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CFI Eyepiece Lens Series
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Eyepieces:
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CFI Eyepiece Lens Series
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Objectives:
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CFI LU/L Plan Series
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Auto Focus Unit:
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Optional (LED)
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Communication:
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RS-232C
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Weight:
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Approximately 45 kg (when 8 x 8 Stage and UW Eyepiece Tube are used)
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Compliance:
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SEMI S2-0200, S8-0600, CE, UL
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